@inproceedings{NimoMeschederMuelleretal.2011, author = {Antwi Nimo and Ulrich Mescheder and Bernhard M{\"u}ller and Awad S. Abou Elkeir}, title = {3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls}, series = {Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic}, isbn = {978-0-8194-8655-4}, doi = {10.1117/12.886876}, year = {2011}, language = {en} }