TY - CHAP U1 - Konferenzveröffentlichung A1 - Nimo, Antwi A1 - Mescheder, Ulrich A1 - Müller, Bernhard A1 - Abou Elkeir, Awad S. T1 - 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls T2 - Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic Y1 - 2011 SN - 978-0-8194-8655-4 SB - 978-0-8194-8655-4 U6 - https://doi.org/10.1117/12.886876 DO - https://doi.org/10.1117/12.886876 SP - 14 S1 - 14 ER -