TY - CHAP U1 - Konferenzveröffentlichung A1 - Nimo, Antwi A1 - Mescheder, Ulrich T1 - 3-D capacitive vibrational harvester for autonomous low power sensors T2 - Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium KW - Electrostatic energy harvester KW - Electret KW - 3-dimenstional KW - System-on-a-chip (SOC) Y1 - 2010 SP - 49 EP - 52 ER -