@inproceedings{KovacsIvanovMalisauskaiteetal.2012,
  author    = {Andras Kovacs and Alexey Ivanov and Aina Malisauskaite and Ulrich Mescheder},
  title     = {Oberfl{\"a}chenstabilisierung nanostrukturierter por{\"o}ser Siliziumschichten f{\"u}r sensorische Anwendungen},
  series = {74. Mikro-Nano-Integration : Beitr{\"a}ge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin},
  publisher = {VDE-Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-3473-3},
  year      = {2012},
  language  = {de}
}