@inproceedings{KovacsMescheder2001,
  author    = {Andras Kovacs and Ulrich Mescheder},
  title     = {Surface Micromachining Process for C-Si as Active Material},
  series = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany},
  publisher = {Springer},
  address   = {Berlin},
  isbn      = {978-3-540-42150-4},
  pages     = {620 -- 623},
  year      = {2001},
  language  = {en}
}