TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Kovacs, Andras
A1  - Martin, Dagmar
A1  - Filbert, Alexander
A1  - Bucher, Volker
A1  - Mescheder, Ulrich
T1  - Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers
JF  - ECS Transactions
Y1  - 2020
SN  - 1938-6737
SS  - 1938-6737
U6  - https://doi.org/10.1149/09802.0121ecst
DO  - https://doi.org/10.1149/09802.0121ecst
VL  - 98.2020
IS  - 2
SP  - 121
EP  - 130
ER  -