TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Kovacs, Andras
A1  - Fahad, A.
A1  - Huster, Rolf
T1  - 3D structuring of c-Si using porous silicon as sacrificial material
T2  - Proceedings of the 2002 2nd IEEE Conference on Nanotechnology:  IEEE-NAN0 2002; August 26-28, Washington 
D.C.
Y1  - 2002
SN  - 0-7803-7538-6
SB  - 0-7803-7538-6
U6  - https://doi.org/10.1109/NANO.2002.1032117
DO  - https://doi.org/10.1109/NANO.2002.1032117
SP  - 33
EP  - 36
ER  -