@inproceedings{IvanovKovacsMescheder2010,
  author    = {Alexey Ivanov and Andras Kovacs and Ulrich Mescheder},
  title     = {Nasschemisches {\"A}tzen von nahezu beliebigen 3D-Strukturen in Silizium},
  series = {63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany},
  publisher = {VDE-Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-3216-6},
  year      = {2010},
  language  = {de}
}