@article{FuerjesKovacsDuecsoeetal.2003,
  author    = {P. F{\"u}rjes and Andras Kovacs and Cs. D{\"u}cs{\"o} and Maria Adam and Bernhard M{\"u}ller and Ulrich Mescheder},
  title     = {Porous silicon-based humidity sensor with interdigital electrodes and internal heaters},
  series   = {Sensors and Actuators B: Chemical},
  volume    = {95.2003},
  number    = {1-3},
  issn      = {0925-4005},
  doi       = {10.1016/S0925-4005(03)00423-4},
  pages     = {140 -- 144},
  year      = {2003},
  language  = {en}
}