@article{KhaziKovacsMescheder2020,
  author    = {Isman M. Khazi and Andras Kovacs and Ulrich Mescheder},
  title     = {Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology},
  series   = {Journal of Applied Material Science \& Engineering Research},
  volume    = {4.2020},
  number    = {4},
  issn      = {2689-1204},
  doi       = {10.33140/JAMSER.04.04.04},
  pages     = {150 -- 154},
  year      = {2020},
  language  = {en}
}