@inproceedings{KovacsVizvaryKovacsetal.2006, author = {Adam Kovacs and Zsolt Vizvary and Andras Kovacs and Ulrich Mescheder}, title = {Large Defection Analysis of Perforated Silicon Nitride Membranes}, series = {6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary}, year = {2006}, language = {en} }