TY - CHAP U1 - Konferenzveröffentlichung A1 - Keshavarzi, Shervin A1 - Mescheder, Ulrich A1 - Reinecke, Holger A1 - Kovacs, Andras T1 - Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration T2 - 23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany Y1 - 2012 ER -