TY - CHAP U1 - Konferenzveröffentlichung A1 - Kovacs, Adam A1 - Vizvary, Zsolt A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - Large Defection Analysis of Perforated Silicon Nitride Membranes T2 - 6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary KW - Perforated silicon nitride KW - Membrane deflection KW - Finite elements Y1 - 2006 SP - 3 S1 - 3 ER -