TY - CHAP U1 - Konferenzveröffentlichung A1 - Huster, Rolf A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - 3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology T2 - Micro system technologies 2005 : International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems, München, October 5 - 6, 2005 Y1 - 2005 SN - 3-7723-7040-3 SB - 3-7723-7040-3 PB - Franzis CY - Poing ER -