@article{IvanovKovacsMescheder2011,
  author    = {Alexey Ivanov and Andras Kovacs and Ulrich Mescheder},
  title     = {High quality 3D shapes by silicon anodization},
  series   = {physica status solidi (a)},
  volume    = {208.2011},
  number    = {6},
  issn      = {1862-6319},
  doi       = {10.1002/pssa.201000163},
  pages     = {1383 -- 1388},
  year      = {2011},
  language  = {en}
}