@inproceedings{KeshavarziMeschederReineckeetal.2012, author = {Shervin Keshavarzi and Ulrich Mescheder and Holger Reinecke and Andras Kovacs}, title = {Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration}, series = {23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany}, year = {2012}, language = {en} }