@article{KovacsKovacsMescheder2008,
  author    = {Adam Kovacs and Andras Kovacs and Ulrich Mescheder},
  title     = {Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations},
  series   = {Computational Materials Science},
  volume    = {43.2008},
  number    = {1},
  issn      = {0927-0256},
  doi       = {10.1016/j.commatsci.2007.07.023},
  pages     = {59 -- 64},
  year      = {2008},
  language  = {en}
}