TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Kovacs, Adam A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations JF - Computational Materials Science KW - Silicon-nitride membrane KW - Critical pressure KW - Microsieve Y1 - 2008 SN - 0927-0256 SS - 0927-0256 U6 - https://doi.org/10.1016/j.commatsci.2007.07.023 DO - https://doi.org/10.1016/j.commatsci.2007.07.023 VL - 43.2008 IS - 1 SP - 59 EP - 64 ER -