@article{IvanovKovacsMescheder,
  author    = {Alexey Ivanov and Andras Kovacs and Ulrich Mescheder},
  title     = {Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments},
  series = {Procedia Engineering},
  volume    = {168.2016},
  issn      = {1877-7058},
  doi       = {10.1016/j.proeng.2016.11.399},
  pages     = {1180 -- 1183},
  language  = {en}
}