@article{AzarhoushangZahediKitzigFrank, author = {Bahman Azarhoushang and Ali Zahedi and Heike Kitzig-Frank}, title = {Hoch effizientes Au{\"s}enrundschleifen von Si3N4-Keramik durch Laserstrukturierung}, series = {Diamond Business}, number = {78}, issn = {1619-5558}, pages = {32 -- 38}, language = {de} }