TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Paknejad, Masih A1 - Azarhoushang, Bahman A1 - Zahedi, Ali A1 - Khakrangin, Mehdi A1 - Kadivar, Mohammadali T1 - Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching JF - The International Journal of Advanced Manufacturing Technology KW - Material removal mechanism KW - Laser structuring KW - Single diamond grit scratching KW - Ultrashort-pulse laser KW - Specific cutting energy KW - Silicon nitride Y1 - 2023 UN - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-93767 SN - 1433-3015 SS - 1433-3015 U6 - https://doi.org/10.1007/s00170-022-10793-0 DO - https://doi.org/10.1007/s00170-022-10793-0 VL - 125.2023 IS - 5-6 SP - 2759 EP - 2775 ER -