@inproceedings{KhaziKovacsZahedietal.2020, author = {Isman M. Khazi and Andras Kovacs and Ali Zahedi and Christian Reser and Ulrich Mescheder and Bahman Azarhoushang and Christoph Reich}, title = {Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion}, series = {2020 IEEE International Conference on Semiconductor Electronics (ICSE), Kuala Lumpur, Malaysia, 2020}, isbn = {978-1-7281-5968-3}, doi = {10.1109/ICSE49846.2020.9166898}, pages = {180 -- 184}, year = {2020}, language = {en} }