TY - CHAP U1 - Konferenzveröffentlichung A1 - Khazi, Isman M. A1 - Kovacs, Andras A1 - Zahedi, Ali A1 - Reser, Christian A1 - Mescheder, Ulrich A1 - Azarhoushang, Bahman A1 - Reich, Christoph T1 - Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion T2 - 2020 IEEE International Conference on Semiconductor Electronics (ICSE), Kuala Lumpur, Malaysia, 2020 KW - Optical fiber sensors KW - Sensor fusion KW - Monitoring KW - Optical fibers KW - Coils Y1 - 2020 SN - 978-1-7281-5968-3 SB - 978-1-7281-5968-3 U6 - https://doi.org/10.1109/ICSE49846.2020.9166898 DO - https://doi.org/10.1109/ICSE49846.2020.9166898 SP - 180 EP - 184 ER -