TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Betz, H.
A1  - Huber, H.-L.
A1  - Pongratz, S.
A1  - Rohrmoser, W.
A1  - Windbracke, W.
A1  - Mescheder, Ulrich
T1  - Silicon X-ray masks: Pattern placement and overlay accuracy
JF  - Microelectronic Engineering
Y1  - 1986
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/0167-9317(86)90028-6
DO  - https://doi.org/10.1016/0167-9317(86)90028-6
VL  - 05.1986
IS  - 1-4
SP  - 41
EP  - 49
ER  -