TY - CHAP U1 - Konferenzveröffentlichung A1 - Mackens, U. A1 - Lüthje, H. A1 - Mescheder, Ulrich A1 - Mund, F. A1 - Pongratz, S. T1 - Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices T2 - Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII Y1 - 1988 SN - 9780892529582 SB - 9780892529582 SP - 7 S1 - 7 ER -