@inproceedings{MackensLuethjeMeschederetal.1988,
  author    = {U. Mackens and H. L{\"u}thje and Ulrich Mescheder and F. Mund and S. Pongratz},
  title     = {Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices},
  series = {Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII},
  isbn      = {9780892529582},
  year      = {1988},
  language  = {en}
}