@inproceedings{MeschederUrbanovicMuelleretal.2008, author = {Ulrich Mescheder and P. Urbanovic and Bernhard M{\"u}ller and Safi Baborie}, title = {Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems}, series = {Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008)}, pages = {501 -- 504}, year = {2008}, language = {en} }