TY - CHAP U1 - Konferenzveröffentlichung A1 - Mescheder, Ulrich A1 - Urbanovic, P. A1 - Müller, Bernhard A1 - Baborie, Safi T1 - Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems T2 - Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008) KW - SiO2 film electrets KW - Ion implantation KW - Charge decay KW - Vibration energy harvesting Y1 - 2008 SP - 501 EP - 504 S1 - 4 ER -