TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Mescheder, Ulrich A1 - Müller, Bernhard A1 - Baborie, Safi A1 - Urbanovic, P. T1 - Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems JF - Journal of Micromechanics and Microengineering Y1 - 2009 SN - 1361-6439 SS - 1361-6439 U6 - https://doi.org/10.1088/0960-1317/19/9/094003 DO - https://doi.org/10.1088/0960-1317/19/9/094003 VL - 19.2009 IS - 9 SP - 6 S1 - 6 ER -