TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Kronast, Wolfgang
A1  - Mescheder, Ulrich
A1  - Müller, Bernhard
T1  - Developement of stress relief suspensions for micro-machined silicon membranes
T2  - COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands
Y1  - 2013
UR  - https://www.comsol.com/paper/development-of-stress-relief-suspensions-for-micro-machined-silicon-membranes-15193
ER  -