TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Kronast, Wolfgang
A1  - Mescheder, Ulrich
A1  - Müller, Bernhard
A1  - Nimo, Antwi
A1  - Braxmaier, Claus
A1  - Schuldt, Thilo
T1  - Development of a tilt actuated micromirror for applications in laser interferometry
T2  - Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States
Y1  - 2010
SN  - 978-0-8194-7990-7
SB  - 978-0-8194-7990-7
U6  - https://doi.org/10.1117/12.859648
DO  - https://doi.org/10.1117/12.859648
SP  - 10
S1  - 10
ER  -