TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Kronast, Wolfgang
A1  - Mescheder, Ulrich
A1  - Müller, Bernhard
A1  - Huster, Rolf
T1  - Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
T2  - Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States
Y1  - 2013
SN  - 0277-786X
SS  - 0277-786X
U6  - https://doi.org/10.1117/12.2001229
DO  - https://doi.org/10.1117/12.2001229
ER  -