@inproceedings{KronastMeschederMuelleretal.2013, author = {Wolfgang Kronast and Ulrich Mescheder and Bernhard M{\"u}ller and Rolf Huster}, title = {Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology}, series = {Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States}, issn = {0277-786X}, doi = {10.1117/12.2001229}, year = {2013}, language = {en} }