@inproceedings{KronastMeschederMuelleretal.2013,
  author    = {Wolfgang Kronast and Ulrich Mescheder and Bernhard M{\"u}ller and Rolf Huster},
  title     = {Entwicklung einer Stressausgleichsstruktur f{\"u}r spannungsarme aktive Membranspiegel in SOI Technologie},
  series = {Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen},
  publisher = {VDE-Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-3555-6},
  pages     = {432 -- 435},
  year      = {2013},
  language  = {de}
}