@inproceedings{KronastMeschederMueller2013, author = {Wolfgang Kronast and Ulrich Mescheder and Bernhard M{\"u}ller}, title = {Developement of stress relief suspensions for micro-machined silicon membranes}, series = {COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands}, year = {2013}, language = {de} }