@article{KronastMeschederMuelleretal.2014, author = {Wolfgang Kronast and Ulrich Mescheder and Bernhard M{\"u}ller and Rolf Huster}, title = {Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13.2014}, number = {1}, issn = {1932-5134}, doi = {10.1117/1.JMM.13.1.011112}, year = {2014}, language = {en} }