TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Kronast, Wolfgang
A1  - Mescheder, Ulrich
A1  - Müller, Bernhard
A1  - Huster, Rolf
T1  - Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
JF  - Journal of Micro/Nanolithography, MEMS, and MOEMS
Y1  - 2014
SN  - 1932-5134
SS  - 1932-5134
U6  - https://doi.org/10.1117/1.JMM.13.1.011112
DO  - https://doi.org/10.1117/1.JMM.13.1.011112
VL  - 13.2014
IS  - 1
ER  -