TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Estan, Carlos
A1  - Somogyi, Gergoe
A1  - Freudenreich, Markus
T1  - MOEMS focusing device with ideal parabolic deflection shape
T2  - Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers
KW  - MOEMS
KW  - Electrostatic  focusing device
KW  - FEM simulation
KW  - SOI
Y1  - 2005
SN  - 0-7803-8994-8
SB  - 0-7803-8994-8
U6  - https://doi.org/10.1109/SENSOR.2005.1496624
DO  - https://doi.org/10.1109/SENSOR.2005.1496624
SP  - 1000
EP  - 1005
S1  - 5
ER  -