@inproceedings{MeschederEstanSomogyietal.2005,
  author    = {Ulrich Mescheder and Carlos Estan and Gergoe Somogyi and Markus Freudenreich},
  title     = {MOEMS focusing device with ideal parabolic deflection shape},
  series = {Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers},
  isbn      = {0-7803-8994-8},
  doi       = {10.1109/SENSOR.2005.1496624},
  pages     = {1000 -- 1005},
  year      = {2005},
  language  = {en}
}