@article{KasteFilbertMeschederetal.2014,
  author    = {Nigol Kaste and Alexander Filbert and Ulrich Mescheder and Toomas Rang and Galina Rang},
  title     = {Process Development For 3D Laser Lithography},
  series   = {WIT Transactions on The Built Environment},
  volume    = {137.2014},
  issn      = {1743-3509},
  doi       = {10.2495/HPSM140131},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-10047},
  pages     = {139 -- 150},
  year      = {2014},
  language  = {en}
}