TY - CHAP U1 - Konferenzveröffentlichung A1 - Mescheder, Ulrich A1 - Keshavarzi, Shervin A1 - Chauhan, Surjitsinh T1 - New concepts for miniaturized MEMS based power systems T2 - IEEE CANDO-EPE 2018 proceedings : IEEE International Conference and Workshop in Óbuda on Electrical and Power Engineering : November 20-21, 2018, Budapest, Hungary KW - Capacitive energy harvesting KW - Electret KW - Energy harvesting KW - Explosive porous silicon Y1 - 2018 SN - 978-1-7281-1154-4 SB - 978-1-7281-1154-4 U6 - https://doi.org/10.1109/CANDO-EPE.2018.8601151 DO - https://doi.org/10.1109/CANDO-EPE.2018.8601151 SP - 000033 EP - 000038 ER -