@inproceedings{MeschederKeshavarziChauhan2018, author = {Ulrich Mescheder and Shervin Keshavarzi and Surjitsinh Chauhan}, title = {New concepts for miniaturized MEMS based power systems}, series = {IEEE CANDO-EPE 2018 proceedings : IEEE International Conference and Workshop in {\´O}buda on Electrical and Power Engineering : November 20-21, 2018, Budapest, Hungary}, isbn = {978-1-7281-1154-4}, doi = {10.1109/CANDO-EPE.2018.8601151}, pages = {000033 -- 000038}, year = {2018}, language = {en} }