TY - CONF A1 - Fath, Andreas A1 - Leskopf, Werner A1 - Bade, Klaus A1 - Bacher, W. T1 - Electroplated nanocrystalline nickel-iron alloys as a new powerful material for microstructured molding tools T2 - Microfabricated Systems and MEMS V : proceedings of the international symposium Y1 - 2000 UR - https://opus.hs-furtwangen.de/frontdoor/index/index/docId/2836 SN - 1-56677-286-9 SP - 7 EP - 16 ER -