@inproceedings{SittkusPetitUrbanetal.2024, author = {Benjamin Sittkus and Julien Petit and Gerald Urban and Ulrich Mescheder}, title = {Crack preserving effect in ultrathin metal films on elastomer membranes induced by e-beam irradiation}, series = {FLEPS2024 : IEEE International Conference on Flexible and Printable Sensors and Systems, June 30 - July 3, 2024,Tampere, Finland ; Conference Proceedings}, publisher = {IEEE}, isbn = {979-8-3503-8326-3}, doi = {10.1109/FLEPS61194.2024.10603515}, year = {2024}, language = {en} }