TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Khazi, Isman M.
A1  - Mescheder, Ulrich
A1  - Muthiah, Uma
T1  - 3D free forms in c-Si via grayscale lithography and RIE
JF  - Microelectronic Engineering
Y1  - 2018
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/j.mee.2018.02.006
DO  - https://doi.org/10.1016/j.mee.2018.02.006
VL  - 193.2018
IS  - June
SP  - 34
EP  - 40
ER  -