@article{KhaziMeschederMuthiah2018,
  author    = {Isman M. Khazi and Ulrich Mescheder and Uma Muthiah},
  title     = {3D free forms in c-Si via grayscale lithography and RIE},
  series   = {Microelectronic Engineering},
  volume    = {193.2018},
  number    = {June},
  issn      = {0167-9317},
  doi       = {10.1016/j.mee.2018.02.006},
  pages     = {34 -- 40},
  year      = {2018},
  language  = {en}
}