@inproceedings{KeshavarziKovacsMescheder2019,
  author    = {Shervin Keshavarzi and Andras Kovacs and Ulrich Mescheder},
  title     = {Porous silicon based antireflection coating for the MWIR range},
  series = {MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – S{\"a}ulen der Digitalisierung und k{\"u}nstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin},
  publisher = {VDE Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-5090-0},
  pages     = {487 -- 490},
  year      = {2019},
  language  = {de}
}