@inproceedings{KhaziMescheder2015, author = {Isman M. Khazi and Ulrich Mescheder}, title = {Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching}, series = {MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe}, publisher = {VDE-Verlag}, address = {Berlin}, isbn = {978-3-8007-4100-7}, pages = {417 -- 420}, year = {2015}, language = {en} }