@inproceedings{MuthiahKhaziMescheder2017,
  author    = {Uma Muthiah and Isman M. Khazi and Ulrich Mescheder},
  title     = {3D Strukturierung von Silizium mittels Grauwert-Technologie},
  series = {MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in M{\"u}nchen},
  publisher = {VDE Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-4491-6},
  pages     = {692 -- 695},
  year      = {2017},
  language  = {de}
}