TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Albers, Albert
A1  - Deigendesch, Tobias
A1  - Enkler, Hans-Georg
A1  - Hauser, Stefan
A1  - Leslabay, Pablo
A1  - Oerding, Jochen
T1  - An integrated approach for validating micro mechanical systems based on simulation and test
JF  - Microsystem Technologies
Y1  - 2008
SN  - 1432-1858
SS  - 1432-1858
U6  - https://doi.org/10.1007/s00542-008-0615-2
DO  - https://doi.org/10.1007/s00542-008-0615-2
VL  - 14.2008
IS  - 12
SP  - 1781
EP  - 1787
ER  -